TY - CONF AU - Li-Anne Liew AU - Svenja Knappe AU - John Moreland AU - Hugh Robinson AU - Leo Hollberg AU - John Kitching C2 - Proceedings of the 17th Annual IEEE International Conference on Micro Electromechanical Systems (MEMS 2004), Maastricht, 1, NL DA - 2004-01-30 00:01:00 LA - en PB - Proceedings of the 17th Annual IEEE International Conference on Micro Electromechanical Systems (MEMS 2004), Maastricht, 1, NL PY - 2004 TI - Micromachined Alkali Atom Vapor Cells for Chip-Scale Atomic Clocks ER -