@conference{758726, author = {Li-Anne Liew and Svenja Knappe and John Moreland and Hugh Robinson and Leo Hollberg and John Kitching}, title = {Micromachined Alkali Atom Vapor Cells for Chip-Scale Atomic Clocks}, year = {2004}, month = {2004-01-30 00:01:00}, publisher = {Proceedings of the 17th Annual IEEE International Conference on Micro Electromechanical Systems (MEMS 2004), Maastricht, 1, NL}, language = {en}, }