Yashar, D.
, Domanski, P.
and DeVoe, D.
(2007),
A Microfabricated Flow Controller for Refrigerant Expansion, IEEE Journal of Microelectromechanical Systems (Journal of MEMs), [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=861029
(Accessed May 14, 2025)
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A Microfabricated Flow Controller for Refrigerant Expansion
Published
Author(s)
, , Don DeVoe
Abstract
A flow controller for refrigerant expansion is reported. Devices are fabricated using a micromolding technique developed for thick nickel electroplating. The device consists of a short tube restrictor with an integrated normally-open valve which, when actuated, presents a controllable blockage into the flow passage to obstruct the flow. Fabricated devices are evaluated with compressed air, with up to 22 % reduction in mass flow rate at maximum actuation of the restrictor. The devices are also evaluated in a 1.5 2 kW R134a vapor compression system, with the ability to control mass flow found to be greatly influenced by the vapor compression cycle s operational parameters. After the inlet pressure, the level of subcooling proved to be the most important parameter. For a cycle operating between 29 C and 4 C saturation temperatures in the condenser and evaporator, respectively, actuation of the device reduced the refrigerant mass flow rate by 3.5 % with 0.6 C subcooling and up to 10.8 % with 5 C subcooling.Citation
IEEE Journal of Microelectromechanical Systems (Journal of MEMs)
Volume
16(5)
Pub Type
Journals
Download Paper
Keywords
microfabricated valve, refrigerant expansion, SU-8
Citation
Issues
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Created October 1, 2007, Updated February 19, 2017