@article{73751,
  author = {David Yashar and Piotr Domanski and Don DeVoe},
  title = {A Microfabricated Flow Controller for Refrigerant Expansion},
  year = {2007},
  number = {16(5)},
  month = {2007-10-01},
  publisher = {IEEE Journal of Microelectromechanical Systems (Journal of MEMs)},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=861029},
  language = {en},
}