TY  - JOUR
AU  - David Yashar
AU  - Piotr Domanski
AU  - Don DeVoe
C2  - IEEE Journal of Microelectromechanical Systems (Journal of MEMs)
DA  - 2007-10-01
LA  - en
M1  - 16(5)
PB  - IEEE Journal of Microelectromechanical Systems (Journal of MEMs)
PY  - 2007
TI  - A Microfabricated Flow Controller for Refrigerant Expansion
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=861029
ER  -