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Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology

Published

Author(s)

Loren W. Linholm, Richard A. Allen, Michael W. Cresswell
Citation
in the Handbook of Critical Dimension Metrology and Process Control
Publisher Info
SPIE,

Citation

Linholm, L. , Allen, R. and Cresswell, M. (1994), Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology, SPIE, (Accessed April 20, 2024)
Created December 30, 1994, Updated October 12, 2021