Linholm, L.
, Allen, R.
and Cresswell, M.
(1994),
Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology, SPIE,
(Accessed June 4, 2023)
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Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology
Published
Author(s)
, ,
Citation
in the Handbook of Critical Dimension Metrology and Process Control
Publisher Info
SPIE,
Pub Type
Books
Citation
Created December 30, 1994, Updated October 12, 2021