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Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology
Published
Author(s)
Loren W. Linholm, Richard A. Allen, Michael W. Cresswell
Citation
in the Handbook of Critical Dimension Metrology and Process Control
Publisher Info
SPIE,
Pub Type
Books
Citation
Linholm, L.
, Allen, R.
and Cresswell, M.
(1994),
Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology, SPIE,
(Accessed June 4, 2023)