Linholm, L.
, Allen, R.
and Cresswell, M.
(1994),
Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology, SPIE,
(Accessed October 9, 2024)
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Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology
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in the Handbook of Critical Dimension Metrology and Process Control
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SPIE,
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Books
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Created December 30, 1994, Updated October 12, 2021