@book{766831,
  author = {Loren Linholm and Richard Allen and Michael Cresswell},
  title = {Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology},
  year = {1994},
  month = {1994-12-31 00:12:00},
  publisher = {SPIE,  },
  language = {en},
}