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PUBLICATIONS

Microelectronic Processing Laboratory at NBS:

Published

Author(s)

T F Leedy, Y M Liu
Citation
- NBS SP 400-53
Report Number
NBS SP 400-53
Pub Type
NIST Pubs

Download Paper

DOI Link

Citation

Leedy, T. and Liu, Y. (1978), Microelectronic Processing Laboratory at NBS:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-53 (Accessed April 18, 2024)

Created January 1, 1978, Updated May 19, 2023