@misc{1161766, author = {T F Leedy and Y M Liu}, title = {Microelectronic Processing Laboratory at NBS:}, year = {1978}, month = {1978-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.SP.400-53}, language = {en}, }