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PUBLICATIONS

A Micro-Gas Delivery System in the Environmental Scanning Electron Microscope for In-Situ Microhotplate Chemical Vapor Deposition

Published

Author(s)

Scott A. Wight, Richard E. Cavicchi, M J. Nystrom

Abstract

A device has been developed for introducing small quantities of gas directly to the specimen in the environmental scanning electron microscope chamber. This micro-gas delivery system is a modification of the micro-injector that delivers gas directly to the specimen under the electron beam. Gasses that are precious or hazardous are particularly suited to this technique because of the control that is afforded the microscope operator. An application of the micro-gas injection system is described; precursor organometalic vapor is delivered to a micromachined miniature hotplate for in situ chemical vapor deposition in the microscope chamber. Nucleation and growth of the tin oxide film can be viewed directly and in live-time.
Citation
Review of Scientific Instruments
Pub Type
Journals

Keywords

chemical vapor deposition, environmental SEM, ESEM, gas injection, microhotplate, scanning electron microscope

Citation

Wight, S. , Cavicchi, R. and Nystrom, M. (2008), A Micro-Gas Delivery System in the Environmental Scanning Electron Microscope for In-Situ Microhotplate Chemical Vapor Deposition, Review of Scientific Instruments (Accessed April 18, 2024)

Created October 16, 2008