@article{893186,
  author = {Scott A. Wight and Richard E. Cavicchi and M Nystrom},
  title = {A Micro-Gas Delivery System in the Environmental Scanning Electron Microscope for In-Situ Microhotplate Chemical Vapor Deposition},
  year = {2008},
  month = {2008-10-16 14:10:10},
  publisher = {Review of Scientific Instruments},
  language = {en},
}