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PUBLICATIONS

Metrology Needs for 2.5D/3D Interconnect

Published

Author(s)

Victor H. Vartanian, Richard A. Allen, Klaus Humler, Steve Olsen, Brian Sapp, Larry Smith

Abstract

This chapter will focus on the metrology steps to support 2.5D and 3D reference flows employing via-mid copper through-silicon via (TSV) processing, wafer thinning, and backside processing using a handle wafer and chip-to-chip bonding. Reference flows that use via formation after thinning or wafer-to-wafer 3D integration will not be addressed.
Citation
Handbook of 3D Integration: Volume 3
Volume
3
Publisher Info
Wiley, Malden, MA
Pub Type
Book Chapters

Download Paper

DOI Link

Keywords

Through silicon via (TSV), Three dimensional stacked integrated circuits (3DS-IC), metrology, interferometry, bond void
Semiconductors and Dimensional metrology

Citation

Vartanian, V. , Allen, R. , Humler, K. , Olsen, S. , Sapp, B. and Smith, L. (2014), Metrology Needs for 2.5D/3D Interconnect, Handbook of 3D Integration: Volume 3, Wiley, Malden, MA, [online], https://doi.org/10.1002/9783527670109.ch29 (Accessed October 13, 2025)

Issues

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Created June 19, 2014, Updated October 12, 2021
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