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Metrology for Emerging Research Devices and Materials

Published

Author(s)

Eric M. Vogel
Proceedings Title
Characterization and Metrology for ULSI Technology: 2005
Conference Dates
March 15-18, 2005
Conference Location
Richardson, TX
Conference Title
2005 International Conference on Characterization and Metrology for ULSI Technology

Citation

Vogel, E. (2005), Metrology for Emerging Research Devices and Materials, Characterization and Metrology for ULSI Technology: 2005, Richardson, TX (Accessed February 28, 2024)
Created September 28, 2005, Updated January 27, 2020