Vogel, E.
(2005),
Metrology for Emerging Research Devices and Materials, Characterization and Metrology for ULSI Technology: 2005, Richardson, TX
(Accessed June 9, 2023)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Metrology for Emerging Research Devices and Materials
Published
Author(s)
Proceedings Title
Characterization and Metrology for ULSI Technology: 2005
Conference Dates
March 15-18, 2005
Conference Location
Richardson, TX
Conference Title
2005 International Conference on Characterization and Metrology for ULSI Technology
Pub Type
Conferences
Citation
Created September 28, 2005, Updated January 27, 2020