TY  - CONF
AU  - Eric Vogel
C2  - Characterization and Metrology for ULSI Technology:  2005, Richardson, TX
DA  - 2005-09-28
LA  - en
PB  - Characterization and Metrology for ULSI Technology:  2005, Richardson, TX
PY  - 2005
TI  - Metrology for Emerging Research Devices and Materials
ER  -