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Methodology for the Computer-Aided Design of Silicon Micromachined Devices in a Standard CMOS Process

Published

Author(s)

Janet M. Cassard, M. Parameswaran, Mona E. Zaghloul, Michael Gaitan
Citation
NIST Interagency/Internal Report (NISTIR) -
Volume
4865

Citation

Cassard, J. , Parameswaran, M. , Zaghloul, M. and Gaitan, M. (1992), Methodology for the Computer-Aided Design of Silicon Micromachined Devices in a Standard CMOS Process, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed April 16, 2024)
Created April 30, 1992, Updated October 12, 2021