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Metastable Atom Lithography: A New Technique for Creating Nanostructures

Published

Author(s)

John D. Gillaspy, K K. Berggren, A Bard, J L. Wilbur, Jabez J. McClelland, S L. Rolston, William D. Phillips, M Prentiss, G M. Whitesides
Citation
IEEE Lasers Electro-Opt Soc Newsletter
Volume
10

Citation

Gillaspy, J. , Berggren, K. , Bard, A. , Wilbur, J. , McClelland, J. , Rolston, S. , Phillips, W. , Prentiss, M. and Whitesides, G. (1996), Metastable Atom Lithography: A New Technique for Creating Nanostructures, IEEE Lasers Electro-Opt Soc Newsletter (Accessed June 14, 2024)

Issues

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Created January 1, 1996, Updated February 19, 2017