@misc{104596,
  author = {John Gillaspy and K Berggren and A Bard and J Wilbur and Jabez McClelland and S Rolston and William Phillips and M Prentiss and G Whitesides},
  title = {Metastable Atom Lithography: A New Technique for Creating Nanostructures},
  year = {1996},
  number = {10},
  month = {1996-01-01},
  publisher = {IEEE Lasers Electro-Opt Soc Newsletter},
  language = {en},
}