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MEMS in Standard CMOS VLSI Technology

Published

Author(s)

Michael Gaitan
Proceedings Title
Proc., Twenty-Ninth Annual Conference on Information Science and Systems
Conference Location
Baltimore, MD

Citation

Gaitan, M. (1995), MEMS in Standard CMOS VLSI Technology, Proc., Twenty-Ninth Annual Conference on Information Science and Systems, Baltimore, MD (Accessed April 23, 2024)
Created December 31, 1995, Updated February 17, 2017