TY  - CONF
AU  - Michael Gaitan
C2  - Proc., Twenty-Ninth Annual Conference on Information Science and Systems, Baltimore, MD
DA  - 1995-12-31
LA  - en
PB  - Proc., Twenty-Ninth Annual Conference on Information Science and Systems, Baltimore, MD
PY  - 1995
TI  - MEMS in Standard CMOS VLSI Technology
ER  -