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Mems-Based Embedded Sensor Virtual Components for SOC
Published
Author(s)
Muhammad Afridi, Allen R. Hefner Jr., David W. Berning, Colleen E. Hood, Ankush Varma, Bruce Jacob, Stephen Semancik
Abstract
The design and implementation of a monolithic MEMS-based (Micro Electro Mechanical Systems) gas sensor virtual component is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the microhotplates include a one-millisecond thermal time constant and a 10 'C/mW thermal efficiency. Tin oxide (SnO2) and titanium oxide (TiO2) sensing films are grown over gold sensing electrodes using low-pressure chemical vapor deposition (LPCVD). Gas sensor characterization results are presented showing isothermal response to carbon monoxide molecules with detection sensitivity better than 100 nanomoles/mole.
Afridi, M.
, Hefner Jr., A.
, Berning, D.
, Hood, C.
, Varma, A.
, Jacob, B.
and Semancik, S.
(2004),
Mems-Based Embedded Sensor Virtual Components for SOC, Solid-State Electronics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31578
(Accessed October 7, 2025)