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Mems-Based Embedded Sensor Virtual Components for SOC



Muhammad Afridi, Allen R. Hefner Jr., David W. Berning, Colleen E. Hood, Ankush Varma, Bruce Jacob, Stephen Semancik


The design and implementation of a monolithic MEMS-based (Micro Electro Mechanical Systems) gas sensor virtual component is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the microhotplates include a one-millisecond thermal time constant and a 10 'C/mW thermal efficiency. Tin oxide (SnO2) and titanium oxide (TiO2) sensing films are grown over gold sensing electrodes using low-pressure chemical vapor deposition (LPCVD). Gas sensor characterization results are presented showing isothermal response to carbon monoxide molecules with detection sensitivity better than 100 nanomoles/mole.
Solid-State Electronics


gas sensor, MEMS, monolithic, SoC, virtual component


Afridi, M. , Hefner Jr., A. , Berning, D. , Hood, C. , Varma, A. , Jacob, B. and Semancik, S. (2004), Mems-Based Embedded Sensor Virtual Components for SOC, Solid-State Electronics, [online], (Accessed May 18, 2024)


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Created June 23, 2004, Updated October 12, 2021