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Mems-Based Embedded Sensor Virtual Components for SOC

Published

Author(s)

Muhammad Afridi, Allen R. Hefner Jr., David W. Berning, Colleen E. Hood, Ankush Varma, Bruce Jacob, Stephen Semancik

Abstract

The design and implementation of a monolithic MEMS-based (Micro Electro Mechanical Systems) gas sensor virtual component is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the microhotplates include a one-millisecond thermal time constant and a 10 'C/mW thermal efficiency. Tin oxide (SnO2) and titanium oxide (TiO2) sensing films are grown over gold sensing electrodes using low-pressure chemical vapor deposition (LPCVD). Gas sensor characterization results are presented showing isothermal response to carbon monoxide molecules with detection sensitivity better than 100 nanomoles/mole.
Citation
Solid-State Electronics
Volume
48

Keywords

gas sensor, MEMS, monolithic, SoC, virtual component

Citation

Afridi, M. , Hefner Jr., A. , Berning, D. , Hood, C. , Varma, A. , Jacob, B. and Semancik, S. (2004), Mems-Based Embedded Sensor Virtual Components for SOC, Solid-State Electronics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31578 (Accessed May 18, 2024)

Issues

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Created June 23, 2004, Updated October 12, 2021