Mems-Based Embedded Sensor Virtual Components for SOC
Muhammad Afridi, Allen R. Hefner Jr., David W. Berning, Colleen E. Hood, Ankush Varma, Bruce Jacob, Stephen Semancik
The design and implementation of a monolithic MEMS-based (Micro Electro Mechanical Systems) gas sensor virtual component is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the microhotplates include a one-millisecond thermal time constant and a 10 'C/mW thermal efficiency. Tin oxide (SnO2) and titanium oxide (TiO2) sensing films are grown over gold sensing electrodes using low-pressure chemical vapor deposition (LPCVD). Gas sensor characterization results are presented showing isothermal response to carbon monoxide molecules with detection sensitivity better than 100 nanomoles/mole.
, Hefner Jr., A.
, Berning, D.
, Hood, C.
, Varma, A.
, Jacob, B.
and Semancik, S.
Mems-Based Embedded Sensor Virtual Components for SOC, Solid-State Electronics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31578
(Accessed November 28, 2023)