TY - JOUR AU - Muhammad Afridi AU - Allen Hefner Jr. AU - David Berning AU - Colleen Hood AU - Ankush Varma AU - Bruce Jacob AU - Stephen Semancik C2 - Solid-State Electronics DA - 2004-06-24 00:06:00 LA - en M1 - 48 PB - Solid-State Electronics PY - 2004 TI - Mems-Based Embedded Sensor Virtual Components for SOC UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31578 ER -