Mechanically Compliant Grating Reflectors for Optomechanics

Published

February 10, 2012

Author(s)

Utku Kemiktarak, Michael Metcalfe, Mathieu Durand, John R. Lawall

Abstract

We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8 x 10^5 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F=1200, and used the optical response to probe the mechanical properties of the membrane.

Citation

Applied Physics Letters

Volume

100

Pub Type

Journals

Download Paper

https://doi.org/10.1063/1.3684248

Local Download

Keywords

subwavelength grating, optomechanics, Fabry-Perot

Citation

Kemiktarak, U. , Metcalfe, M. , Durand, M. and Lawall, J. (2012), Mechanically Compliant Grating Reflectors for Optomechanics, Applied Physics Letters, [online], https://doi.org/10.1063/1.3684248, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908700 (Accessed October 8, 2025)