@article{1292336, author = {Utku Kemiktarak and Michael Metcalfe and Mathieu Durand and John R. Lawall}, title = {Mechanically Compliant Grating Reflectors for Optomechanics}, year = {2012}, number = {100}, month = {2012-02-10 05:02:00}, publisher = {Applied Physics Letters}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908700}, doi = {https://doi.org/10.1063/1.3684248}, language = {en}, }