Balasubramanian Muralikrishnan, Jack A. Stone Jr., John R. Stoup
The focus of this paper is on the metrology of microstructures. Traditional Coordinate Measuring Machines (CMM) are limited to measuring holes of 300 m diameter. Smaller features and holes require thinner styli & novel probing technologies that can replace the probing system of the CMMs. In this paper, we focus on recent efforts by a number of researchers in developing new probing technologies that can measure micro features and holes of sizes as small as 50 m. We discuss technologies such as - electrical conductance detection from a vibrating probe to part, changes in resonant frequency of a vibrating probe upon contact, SPM type piezo-resistive strain gage probing, optical techniques etc. We also discuss a technique we are currently working on at the National Institute of Standards and Technology (NIST) to measure holes of the order of 100 m diameter. We will discuss 2D performance of this probe and also present ideas for extension of the probe to full 3D capability.
Proceedings of MicroManufacturing Conference 2005, Society for Manufacturing Engineers
January 1, 2005
Minneapolis , MN
MicroManufacturing Conference 2005, Society for Manufacturing Engineers
, Stone, J.
and Stoup, J.
Measuring Internal Geometry of Fiber Ferrules, Proceedings of MicroManufacturing Conference 2005, Society for Manufacturing Engineers, Minneapolis , MN, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824599
(Accessed February 22, 2024)