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Measurements on the NIST GEC Reference Cell

Published

Author(s)

J R. Roberts, James K. Olthoff, Richard J. Van Brunt, James Whetstone
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)Symp. on Advanced Techniques for Integrated Circuit Processing,
Conference Dates
October 1-5, 1990
Conference Location
Santa Clara, CA

Citation

Roberts, J. , Olthoff, J. , Van Brunt, R. and Whetstone, J. (1991), Measurements on the NIST GEC Reference Cell, Proc. Intl. Soc. for Optical Engineering (SPIE)Symp. on Advanced Techniques for Integrated Circuit Processing, , Santa Clara, CA (Accessed April 21, 2024)
Created January 1, 1991, Updated October 12, 2021