@conference{760621,
  author = {J Roberts and James Olthoff and Richard Van Brunt and James Whetstone},
  title = {Measurements on the NIST GEC Reference Cell},
  year = {1991},
  month = {1991-01-01 12:01:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE)Symp. on Advanced Techniques for Integrated Circuit Processing, , Santa Clara, CA},
  language = {en},
}