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Measurements and modeling of ion energy distribution in high-density, radio-frequency biased CF4 discharges

Published

Author(s)

Mark A. Sobolewski, Yicheng Wang, Amanda N. Goyettes
Citation
Journal of Applied Physics

Citation

Sobolewski, M. , Wang, Y. and Goyettes, A. (2002), Measurements and modeling of ion energy distribution in high-density, radio-frequency biased CF4 discharges, Journal of Applied Physics (Accessed February 27, 2024)
Created April 30, 2002, Updated October 12, 2021