Sobolewski, M.
, Wang, Y.
and Goyettes, A.
(2002),
Measurements and modeling of ion energy distribution in high-density, radio-frequency biased CF4 discharges, Journal of Applied Physics
(Accessed June 4, 2023)
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Measurements and modeling of ion energy distribution in high-density, radio-frequency biased CF4 discharges
Published
Author(s)
, , Amanda N. Goyettes
Citation
Journal of Applied Physics
Pub Type
Journals
Citation
Created April 30, 2002, Updated October 12, 2021