@article{780936,
  author = {Mark Sobolewski and Yicheng Wang and Amanda Goyettes},
  title = {Measurements and modeling of ion energy distribution in high-density, radio-frequency biased CF4 discharges},
  year = {2002},
  month = {2002-05-01 00:05:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}