NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 NM

Published

Author(s)

John H. Burnett, Simon G. Kaplan

Abstract

We discuss our approaches for measuring the absolute index (n) and its dependencies on wavelength (dn/d(lambda)) and temperature (dn/dT), of high-purity water for wavelengths near 193 nm, using the minimum deviation prism method and an interferometric technique. We present preliminary results for these quantities measured by the minimum deviation method.
Citation
SPIE Meeting
Pub Type
Journals

Keywords

193 nm immersion lithography, index of refraction, refractive index, thermo-optic coefficient, water

Citation

Burnett, J. and Kaplan, S. (2004), Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 NM, SPIE Meeting (Accessed October 2, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 1, 2004, Updated June 27, 2017
Was this page helpful?