Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 NM
John H. Burnett, Simon G. Kaplan
We discuss our approaches for measuring the absolute index (n) and its dependencies on wavelength (dn/d(lambda)) and temperature (dn/dT), of high-purity water for wavelengths near 193 nm, using the minimum deviation prism method and an interferometric technique. We present preliminary results for these quantities measured by the minimum deviation method.
193 nm immersion lithography, index of refraction, refractive index, thermo-optic coefficient, water
and Kaplan, S.
Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 NM, SPIE Meeting
(Accessed May 30, 2023)