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Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 NM

Published

Author(s)

John H. Burnett, Simon G. Kaplan

Abstract

We discuss our approaches for measuring the absolute index (n) and its dependencies on wavelength (dn/d(lambda)) and temperature (dn/dT), of high-purity water for wavelengths near 193 nm, using the minimum deviation prism method and an interferometric technique. We present preliminary results for these quantities measured by the minimum deviation method.
Citation
SPIE Meeting

Keywords

193 nm immersion lithography, index of refraction, refractive index, thermo-optic coefficient, water

Citation

Burnett, J. and Kaplan, S. (2004), Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 NM, SPIE Meeting (Accessed April 18, 2024)
Created January 1, 2004, Updated June 27, 2017