Olthoff, J.
, Roberts, J.
, Van brunt, R.
, Whetstone, J.
, Sobolewski, M.
and Djurovi{cacute}, S.
(1991),
Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors, Technical Symposium on Microelectronic Processing Integration , San Jose, CA, USA
(Accessed April 19, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors
Published
Author(s)
, , R J. Van brunt, , M A. Sobolewski, S Djurovi{cacute}
Proceedings Title
Technical Symposium on Microelectronic Processing Integration
Conference Dates
September 9-13, 1991
Conference Location
San Jose, CA, USA
Conference Title
SPIE Technical Symposium on Microelectronic Processing Integration
Pub Type
Conferences
Citation
Created December 31, 1990, Updated October 12, 2021