@conference{784936,
  author = {James Olthoff and J Roberts and R Van brunt and James Whetstone and M Sobolewski and S Djurovi{cacute}},
  title = {Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors},
  year = {1991},
  month = {1991-01-01 00:01:00},
  publisher = {Technical Symposium on Microelectronic Processing Integration , San Jose, CA, USA},
  language = {en},
}