Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors

Published

Author(s)

James K. Olthoff, J R. Roberts, R J. Van brunt, James Whetstone, M A. Sobolewski, S Djurovi{cacute}
Proceedings Title
Technical Symposium on Microelectronic Processing Integration
Conference Dates
September 9-13, 1991
Conference Location
San Jose, CA, USA
Conference Title
SPIE Technical Symposium on Microelectronic Processing Integration

Citation

Olthoff, J. , Roberts, J. , Van brunt, R. , Whetstone, J. , Sobolewski, M. and Djurovi{cacute}, S. (1991), Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors, Technical Symposium on Microelectronic Processing Integration , San Jose, CA, USA (Accessed February 27, 2024)
Created December 31, 1990, Updated October 12, 2021