Berg, R.
, Green, D.
and Mattingly, G.
(2001),
Mass Flow Research and Standards: NIST Workshop Results, Future Fab International, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830708 (Accessed May 3, 2026)
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Mass Flow Research and Standards: NIST Workshop Results
Published
Author(s)
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Abstract
A recent workshop at the National Institute of Standards and Technology (NIST) identified research and standards that will benefit users and manufacturers of mass flow controllers and related equipment. The workshop identified problems with flow measurement in the semiconductor industry and proposed 21 tasks directed at those problems. Seven tasks were strongly recommended.Citation
Future Fab International
Volume
10
Pub Type
Journals
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Keywords
flow measurement, mass flow controller, NIST
Citation
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Created July 1, 2001, Updated February 19, 2017