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Mass Flow Research and Standards: NIST Workshop Results



Robert F. Berg, David S. Green, G E. Mattingly


A recent workshop at the National Institute of Standards and Technology (NIST) identified research and standards that will benefit users and manufacturers of mass flow controllers and related equipment. The workshop identified problems with flow measurement in the semiconductor industry and proposed 21 tasks directed at those problems. Seven tasks were strongly recommended.
Future Fab International


flow measurement, mass flow controller, NIST


Berg, R. , Green, D. and Mattingly, G. (2001), Mass Flow Research and Standards: NIST Workshop Results, Future Fab International, [online], (Accessed May 19, 2024)


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Created July 1, 2001, Updated February 19, 2017