@article{68426,
  author = {Robert Berg and David Green and G Mattingly},
  title = {Mass Flow Research and Standards: NIST Workshop Results},
  year = {2001},
  number = {10},
  month = {2001-07-01},
  publisher = {Future Fab International},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830708},
  language = {en},
}