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Lowering the Limit of Detection in High Spatial Resolution Electron Beam Microanalysis With the Microcalorimeter Energy Dispersive X-Ray Spectrometer

Published

Author(s)

Dale E. Newbury, David A. Wollman, Kent D. Irwin, Gene C. Hilton, John M. Martinis

Abstract

Low-beam-energy x-ray microanalysis with the field-emission-gun scanning electron microscope suffers limitations due to physical factors of x-ray generation. Instrumental limitations are imposed by the poor resolution of the conventional semiconductor energy dispersive x-ray spectrometry. Wavelength dispersive x-ray spectrometry provides sufficient resolution to solve spectroscopic problems, but the poor geometric efficiency and the single channel nature of spectrum measurement restrict its practical use for low beam energy microanalysis. The microcalorimeter energy dispersive x-ray spectrometer combines high resolution (
Citation
Ultramicroscopy
Volume
78
Issue
1-4

Keywords

electron probe x-ray microanalysis, energy dispersive x-ray spectrometry, microanalysis, microcalorimetry

Citation

Newbury, D. , Wollman, D. , Irwin, K. , Hilton, G. and Martinis, J. (1999), Lowering the Limit of Detection in High Spatial Resolution Electron Beam Microanalysis With the Microcalorimeter Energy Dispersive X-Ray Spectrometer, Ultramicroscopy, [online], https://doi.org/10.1016/S0304-3991(99)00028-5 (Accessed May 18, 2024)

Issues

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Created June 1, 1999, Updated November 10, 2018