Low loss superconducting titanium nitride coplanar waveguide resonators

Published

December 9, 2010

Author(s)

Michael Vissers, Jiansong Gao, David S. Wisbey, David P. Pappas, C. C. Tsuei, A. D. Corcoles, Matthias Steffen

Abstract

Thin films of TiN were sputter-deposited onto Si and sapphire wafers with and without SiN buffer layers. The films were fabricated into RF coplanar waveguide resonators, and internal quality factor measurements were taken at millikelvin temperatures in both the many photon and single photon, i.e. high and low power regimes, respectively. At high power, internal quality factors ($Q_i$'s) higher than $10^7$ were measured for TiN with predominantly a (200)-TiN orientation. Films that showed signifiant (111)-TiN texture invariably had much lower $Q_i$'s, on the order of $10^5$. Our studies show that the (200)-TiN is favored for growth at high temperature on either bare Si or SiN buffer layers. However, growth on bare sapphire or Si(100) at low temperature resulted in primarily a (111)-TiN orientation. Ellipsometry and Auger measurements indicate that the (200)-TiN growth on the bare Si substrates is correlated with to the formation of a thin, $\approx 2$ nm, layer of SiN during the pre-deposition procedure. In the single photon regime, $Q_i$ of these films exceeded $8\times10^5$, while thicker SiN buffer layers led to reduced $Q_i$'s at low power.

Citation

Applied Physics Letters

Volume

97

Issue

23

Pub Type

Journals

Download Paper

https://doi.org/10.1063/1.3517252

Local Download

Keywords

Supconducting resonators, coplanar waveguides, high quality factor, Titanium Nitride

Citation

Vissers, M. , Gao, J. , Wisbey, D. , Pappas, D. , Tsuei, C. , Corcoles, A. and Steffen, M. (2010), Low loss superconducting titanium nitride coplanar waveguide resonators, Applied Physics Letters, [online], https://doi.org/10.1063/1.3517252, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906241 (Accessed October 10, 2025)