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Low loss superconducting titanium nitride coplanar waveguide resonators



Michael Vissers, Jiansong Gao, David S. Wisbey, David P. Pappas, C. C. Tsuei, A. D. Corcoles, Matthias Steffen


Thin films of TiN were sputter-deposited onto Si and sapphire wafers with and without SiN buffer layers. The films were fabricated into RF coplanar waveguide resonators, and internal quality factor measurements were taken at millikelvin temperatures in both the many photon and single photon, i.e. high and low power regimes, respectively. At high power, internal quality factors ($Q_i$'s) higher than $10^7$ were measured for TiN with predominantly a (200)-TiN orientation. Films that showed signifiant (111)-TiN texture invariably had much lower $Q_i$'s, on the order of $10^5$. Our studies show that the (200)-TiN is favored for growth at high temperature on either bare Si or SiN buffer layers. However, growth on bare sapphire or Si(100) at low temperature resulted in primarily a (111)-TiN orientation. Ellipsometry and Auger measurements indicate that the (200)-TiN growth on the bare Si substrates is correlated with to the formation of a thin, $\approx 2$ nm, layer of SiN during the pre-deposition procedure. In the single photon regime, $Q_i$ of these films exceeded $8\times10^5$, while thicker SiN buffer layers led to reduced $Q_i$'s at low power.
Applied Physics Letters


Supconducting resonators, coplanar waveguides, high quality factor, Titanium Nitride


Vissers, M. , Gao, J. , Wisbey, D. , Pappas, D. , Tsuei, C. , Corcoles, A. and Steffen, M. (2010), Low loss superconducting titanium nitride coplanar waveguide resonators, Applied Physics Letters, [online],, (Accessed June 7, 2023)
Created December 8, 2010, Updated October 12, 2021