@article{816166,
  author = {Michael Vissers and Jiansong Gao and David Wisbey and David Pappas and C. Tsuei and A. Corcoles and Matthias Steffen},
  title = {Low loss superconducting titanium nitride coplanar waveguide resonators},
  year = {2010},
  number = {97},
  month = {2010-12-09 00:12:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906241},
  doi = {https://doi.org/10.1063/1.3517252},
  language = {en},
}