TY - JOUR AU - Michael Vissers AU - Jiansong Gao AU - David Wisbey AU - David Pappas AU - C. Tsuei AU - A. Corcoles AU - Matthias Steffen C2 - Applied Physics Letters DA - 2010-12-09 00:12:00 DO - https://doi.org/10.1063/1.3517252 LA - en M1 - 97 PB - Applied Physics Letters PY - 2010 TI - Low loss superconducting titanium nitride coplanar waveguide resonators UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906241 ER -