A Low Cost Digital Vibration Meter

Published

April 1, 2007

Author(s)

William V. Payne, Jon Geist

Abstract

This report describes the development of a low cost vibration amplitude sensor. The processes used to develop this sensor involve the use of Micro-Electronic and Mechanical Systems (MEMS) manufacturing techniques. The major mechanical element of the vibration sensor is the cantilever beam which is on the order of 500 m in length. Vibration of the MEMS device in the plane perpendicular to the cantilever beam causes flexing of the beam which produces changes in the resistance of a piezoresistor etched at the base of the beam (spring element). These changes in resistance (and thus voltage) along with a unique signal processing scheme are used to determine the acceleration amplitude of the MEMS device.

Citation

Journal of Research (NIST JRES) -

Volume

112 No. 2

NIST Pub Series

Journal of Research (NIST JRES)

Pub Type

NIST Pubs

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Keywords

approximate root mean square, cantilever accelerometer, micro electro mechanical system, vibration meter

Citation

Payne, W. and Geist, J. (2007), A Low Cost Digital Vibration Meter, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=861030 (Accessed October 14, 2025)