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A Low Cost Digital Vibration Meter



William V. Payne, Jon Geist


This report describes the development of a low cost vibration amplitude sensor. The processes used to develop this sensor involve the use of Micro-Electronic and Mechanical Systems (MEMS) manufacturing techniques. The major mechanical element of the vibration sensor is the cantilever beam which is on the order of 500 m in length. Vibration of the MEMS device in the plane perpendicular to the cantilever beam causes flexing of the beam which produces changes in the resistance of a piezoresistor etched at the base of the beam (spring element). These changes in resistance (and thus voltage) along with a unique signal processing scheme are used to determine the acceleration amplitude of the MEMS device.
Journal of Research (NIST JRES) -
112 No. 2


approximate root mean square, cantilever accelerometer, micro electro mechanical system, vibration meter


Payne, W. and Geist, J. (2007), A Low Cost Digital Vibration Meter, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], (Accessed June 21, 2024)


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Created April 1, 2007, Updated February 19, 2017