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Localized Plasma Etching for Device Optimization

Published

Author(s)

Donald R. Larson, D. L. Veasey
Citation
Journal of Vacuum Science and Technology
Volume
10
Issue
1

Citation

Larson, D. and Veasey, D. (1992), Localized Plasma Etching for Device Optimization, Journal of Vacuum Science and Technology (Accessed December 13, 2024)

Issues

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Created November 30, 1992, Updated October 12, 2021