Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Localized Plasma Etching for Device Optimization

Published

Author(s)

Donald R. Larson, D. L. Veasey
Citation
Journal of Vacuum Science and Technology
Volume
10
Issue
1

Citation

Larson, D. and Veasey, D. (1992), Localized Plasma Etching for Device Optimization, Journal of Vacuum Science and Technology (Accessed April 20, 2024)
Created November 30, 1992, Updated October 12, 2021