TY  - JOUR
AU  - Larson, Donald
AU  - Veasey, D.
C2  - Journal of Vacuum Science and Technology
DA  - 1992-12-01 00:12:00
LA  - en
M1  - 10
PB  - Journal of Vacuum Science and Technology
PY  - 1992
TI  - Localized Plasma Etching for Device Optimization
ER  -