Lithography With Self-Assembled Copolymer Microdomains
C Harrison, John A. Dagata, P Adamson
There are many research groups working on copolymer lithography;many more have expressed interest in joining the field.Researchers who are new to this area will find the broad reviewof copolymer thin films by Fasolka and Mayes to be a highlyvaluable resource. However, to thisresearcher's knowledge, no comprehensive review of copolymerlithography currently exists. Therefore, we undertake one suchreview here which will enable lithography researchers to quicklycome up to speed.
Developments in Block Copolymer Science and Technology
copolymer, lithography, self-assembling
, Dagata, J.
and Adamson, P.
Lithography With Self-Assembled Copolymer Microdomains, Developments in Block Copolymer Science and Technology
(Accessed June 1, 2023)