Lee, K.
(1992),
A Lithium-drift Technique for Making Submicrometer Thick Silicon Membranes, Proc. Symposium on Electrochemical Microfabrication, Pennington, NJ
(Accessed December 11, 2023)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
A Lithium-drift Technique for Making Submicrometer Thick Silicon Membranes
Published
Author(s)
Proceedings Title
Proc. Symposium on Electrochemical Microfabrication
Conference Location
Pennington, NJ
Pub Type
Conferences
Citation
Created October 1, 1992, Updated February 19, 2017