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A Lithium-drift Technique for Making Submicrometer Thick Silicon Membranes

Published

Author(s)

Kevin C. Lee
Proceedings Title
Proc. Symposium on Electrochemical Microfabrication
Conference Location
Pennington, NJ

Citation

Lee, K. (1992), A Lithium-drift Technique for Making Submicrometer Thick Silicon Membranes, Proc. Symposium on Electrochemical Microfabrication, Pennington, NJ (Accessed July 14, 2024)

Issues

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Created October 1, 1992, Updated February 19, 2017