Lee, K.
(1992),
A Lithium-drift Technique for Making Submicrometer Thick Silicon Membranes, Proc. Symposium on Electrochemical Microfabrication, Pennington, NJ
(Accessed May 10, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
A Lithium-drift Technique for Making Submicrometer Thick Silicon Membranes
Published
Author(s)
Proceedings Title
Proc. Symposium on Electrochemical Microfabrication
Conference Location
Pennington, NJ
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created October 1, 1992, Updated February 19, 2017