TY  - CONF
AU  - Lee, Kevin
C2  - Proc. Symposium on Electrochemical Microfabrication, Pennington, NJ
DA  - 1992-10-01
LA  - en
PB  - Proc. Symposium on Electrochemical Microfabrication, Pennington, NJ
PY  - 1992
TI  - A Lithium-drift Technique for Making Submicrometer Thick Silicon Membranes
ER  -