Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Linewidth Intercomparison on a Polysilicon Sample

Published

Author(s)

John S. Villarrubia, Andras Vladar, Michael T. Postek, Ronald G. Dixson

Abstract

Not available.
Citation
ISEMATECH Technology Transfer Document; NIST/ SEMATECH Proprietary

Keywords

AFM, atomic force microscopy, critical dimension metrology, library-based metrology, linewidth metrology, scanning electron microscopy, SEM

Citation

Villarrubia, J. , Vladar, A. , Postek, M. and Dixson, R. (2000), Linewidth Intercomparison on a Polysilicon Sample, ISEMATECH Technology Transfer Document; NIST/ SEMATECH Proprietary (Accessed April 15, 2024)
Created November 1, 2000, Updated February 19, 2017