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Lattice Damage and Atomic Mixing Induced by As++ Implantation and Thermal Annealing in AlAs/GaAs Multiple Quantum-Well Structures

Published

Author(s)

D. X. Huang, M. Kallergi, J. Augel, S. Sundaram, G. C. DeSalvo, J. Comas
Citation
Journal of Applied Physics
Volume
70
Issue
8

Citation

Huang, D. , Kallergi, M. , Augel, J. , Sundaram, S. , DeSalvo, G. and Comas, J. (1991), Lattice Damage and Atomic Mixing Induced by As++ Implantation and Thermal Annealing in AlAs/GaAs Multiple Quantum-Well Structures, Journal of Applied Physics (Accessed February 26, 2024)
Created October 14, 1991, Updated October 12, 2021