An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
James L. Hanssen, Jabez J. McClelland, E Dakin, M Jacka
Abstract
The evolving field of nanofabrication demands that more precise fabrication and evaluation tools be developed. We describe a method for creating a high quality focused ion beam with enhanced capabilities using an ion source based on laser-cooled neutral atoms in a magneto-optical trap. This technique will improve resolution and brightness beyond the current state of the art, can be used with the full range of atomic species that can be laser cooled and trapped, and will allow unprecedented control over the ion emission, allowing, for example, the production of single ions "on demand." We give estimates for the emittance and present a realistic ray tracing analysis of a basic focusing system demonstrating the feasibility of focusing the beam to a spot size of less than 10 nm.
Citation
Physical Review A (Atomic, Molecular and Optical Physics)
Hanssen, J.
, McClelland, J.
, Dakin, E.
and Jacka, M.
(2006),
Laser Cooled Atoms as a Focused Ion Beam Source, Physical Review A (Atomic, Molecular and Optical Physics)
(Accessed April 17, 2024)