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Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates
Published
Author(s)
Shigehito Miki, Mikio Fujiwara, Masahide Sasaki, Burm Baek, Aaron Miller, Robert Hadfield, Sae Woo Nam, Zhen Wang
Abstract
We report on the performance of large area NbN nanowire superconducting single-photon detectors (SSPDs). 20 x 20 υm2 area SSPDs with 80 and 100 nm linewidths and 50% fill factor were fabricated in 4-nm-thick NbN films grown on single-crystal MgO substrates. The high quality of the devices was verified by electrical and optical testing and compares favorably to measurements of 10 x 10 υm2 area SSPDs. Meaurements of kinetic inductance versus bias current indicate that the constrictin density id low. The fiber-coupled detection efficiency of the devices was 0.4%-3.5% at 100 Hz dark count rate.
Miki, S.
, Fujiwara, M.
, Sasaki, M.
, Baek, B.
, Miller, A.
, Hadfield, R.
, Nam, S.
and Wang, Z.
(2008),
Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902205
(Accessed October 14, 2025)