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PUBLICATIONS

ITRS Chapter: MEMS

Published

Author(s)

Michael Gaitan

Abstract

The ITRS has organized a MEMS Technology Working Group (TWG), which has developed a new chapter on MEMS for its 2011 report. The report focuses on MEMS technologies associated with mobile Internet devices, such as smartphones and tablet computers. These applications represent the fastest growing segment in MEMS manufacturing, according to 2011 market forecasts by iSuppli, Yole Développement and SEMI.
Citation
Future Fab International
Volume
44
Pub Type
Journals

Download Paper

Local Download

Keywords

MEMS, Technology Roadmapping, Inertial, Sensors, Microelectromechanical Systems
Sensors and Manufacturing

Citation

Gaitan, M. (2013), ITRS Chapter: MEMS, Future Fab International, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913266 (Accessed October 22, 2025)

Issues

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Created January 30, 2013, Updated June 12, 2017
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